JPS6163834U - - Google Patents
Info
- Publication number
- JPS6163834U JPS6163834U JP1985156051U JP15605185U JPS6163834U JP S6163834 U JPS6163834 U JP S6163834U JP 1985156051 U JP1985156051 U JP 1985156051U JP 15605185 U JP15605185 U JP 15605185U JP S6163834 U JPS6163834 U JP S6163834U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- mask pattern
- thickness
- rays
- stopping power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985156051U JPS6130278Y2 (en]) | 1985-10-11 | 1985-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985156051U JPS6130278Y2 (en]) | 1985-10-11 | 1985-10-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6163834U true JPS6163834U (en]) | 1986-04-30 |
| JPS6130278Y2 JPS6130278Y2 (en]) | 1986-09-05 |
Family
ID=30714068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985156051U Expired JPS6130278Y2 (en]) | 1985-10-11 | 1985-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130278Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011503670A (ja) * | 2007-11-20 | 2011-01-27 | イーストマン コダック カンパニー | ディスプレイ回路を製造するための多色マスク方法 |
-
1985
- 1985-10-11 JP JP1985156051U patent/JPS6130278Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011503670A (ja) * | 2007-11-20 | 2011-01-27 | イーストマン コダック カンパニー | ディスプレイ回路を製造するための多色マスク方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130278Y2 (en]) | 1986-09-05 |